Megalam ES Fabsafe

HEPA (H14) and ULPA (U15, U16, U17) filter panels with ultra low outgassing components especially made for turbulent and laminar airflow applications in microelectronic industry. Optimized membrane media for low pressure drop.

  • Developed for microelectronic cleanrooms and equipment
  • No organic outgassing from test aerosol
  • Ultra-low outgassing (dopant free) components
  • 100% filter scan tested according to ISO29463
  • Individual efficiency test reports
  • Energy saving with low pressure drop PTFE media
  • Manufactured and packed in a controlled environment
  • ICON9 en1822
  • ICON12 Fabsafe
  • ICON42 UL logo
Item Type Filter Class EN1822 Width (mm) Height (mm) Depth (mm) Pressure drop (Pa)
ES Fabsafe MD H14 H14 1170 1170 50 75
ES Fabsafe MD H14 H14 1170 570 50 75
ES Fabsafe MD H14 H14 1170 1170 66 60
ES Fabsafe MD H14 H14 1170 570 66 60
ES Fabsafe MX H14 H14 1170 1170 90 50
ES Fabsafe MX H14 H14 1170 570 90 50
ES Fabsafe MD U15 U15 1170 1170 50 90
ES Fabsafe MD U15 U15 1170 570 50 90
ES Fabsafe MD U15 U15 1170 1170 66 75
ES Fabsafe MD U15 U15 1170 570 66 75
ES Fabsafe MX U15 U15 1170 1170 90 65
ES Fabsafe MX U15 U15 1170 570 90 65
ES Fabsafe MD U16 U16 1170 1170 66 105
ES Fabsafe MD U16 U16 1170 570 66 105
ES Fabsafe MX U16 U16 1170 1170 90 85
ES Fabsafe MX U16 U16 1170 570 90 85

Specifications

Application
Microelectronic cleanrooms and equipment. Low energy usage
Filter Frame
Anodized aluminium
Media
Membrane
Max temperature (°C)
70ºC
Relative Humidity
100%
Separator
Hot-melt Separator Technology
Gasket
EPDM
Grille, Downstream
Expanded metal painted
Grille, Upstream
Expanded metal painted
Sealant
Polyurethane
Comment
Test: 100% individual scan test according to EN1822, IEST RP-CC007 or required standard.
Test aerosol: PSL. Oil free.
Fire rating: UL900
Remarks: Many frame options and dimensions are available on request.

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