Megalam FabSafe

HEPA (H14) and ULPA (U15, U16) filter panels with ultra low outgassing components especially made for turbulent and laminar airflow applications in microelectronic industry. Optimized with glass fiber media for low pressure drop and long life time.

  • Developed for microelectronic cleanrooms and equipment
  • Ideal for nanoparticle filtration (100 nm)
  • No organic outgassing from test aerosol
  • Ultra-low outgassing (dopant free) components
  • 100% filter scan tested according to ISO29463
  • Individual efficiency test reports
  • High dust holding capacity
  • Manufactured and packed in a controlled environment
  • ICON9 en1822
  • ICON12 Fabsafe
  • ICON42 UL logo
Item Type Filter Class EN1822 Width (mm) Height (mm) Depth (mm) Pressure drop (Pa)
MD13-2G10-1170x1170-1/EPDM-FS H13 1170 1170 66 110
MD13-1170x570-10/02-FS H13 1170 570 66 110
MD14-1170x1170-10/02-FS H14 1170 1170 66 130
MD14-1170x570-10/02-FS H14 1170 570 66 130
MX14-1170x1170-10/02-FS H14 1170 1170 90 90
MX14-1170x570-10/02-FS H14 1170 570 90 90
MG14-1170x1170-10/02-FS H14 1170 1170 110 60
MG14-1170x570-10/02-FS H14 1170 570 110 60
MD15-1170x1170-10/02-FS U15 1170 1170 66 140
MD15-1170x570-10/02-FS U15 1170 570 66 140
MX15-1170x1170-10/02-FS U15 1170 1170 90 110
MX15-1170x570-10/02-FS U15 1170 570 90 110
MG15-1170x1170-10/02-FS U15 1170 1170 110 80
MG15-1170x570-10/02-FS U15 1170 570 110 80
MX16-1170x1170-10/02-FS U16 1170 1170 90 130
MX16-1170x570-10/02-FS U16 1170 570 90 130
MG16-1170x1170-10/02-FS U16 1170 1170 110 90
MG16-1170x570-10/02-FS U16 1170 570 110 90

Specifications

Application
Microelectronic cleanrooms and equipment.
Filter Frame
Extruded anodized aluminium
Media
Glass fiber
Max temperature (°C)
70ºC
Relative Humidity
100%
Recommended final pressure drop
MD: 500 Pa, MX: 600 pa, MG:800 Pa
Recommended final pressure drop
2x Initial pressure drop
Separator
Hot-melt
Gasket
EPDM
Grille, Downstream
Expanded metal painted
Grille, Upstream
Expanded metal painted
Sealant
Polyurethane
Max Airflow
Can be calculated on request
Comment
Test: 100% individual scan test according to EN1822, IEST RP-CC007 or required standard
Test aerosol: PSL. Oil free
Fire rating: UL900
Many frame options and dimensions are available on request

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